| 尺寸 | 轴心 | 过程(μm) | 辨认率(nm) | 多次精确性(nm) |
| Z-STAGE | Z | 5/10/25/50 | 0.005/0.01/0.025/0.05 | 0.01/0.02/0.05/0.1 |
| C-Z.100 | Z | 100 | 0.1 | 0.2 |
| FOCHS.100 | Z | 100 | 0.1 | 0.2 |
| FOC | Z | 100/200/300 | 0.1/0.2/0.3 | 0.2/0.4/0.6 |
| Z-INSERT | Z | 100/200/300/500 | 0.1/0.2/0.3/0.5 | 0.2/0.4/0.6/1.0 |
| Z-INSERT K-TYPE | Z | 100/200/300 | 0.1/0.2/0.3 | 0.2/0.4/0.6 |
| Z-INSERT-INC | Z | 100/200/300/500 | 0.1/0.2/0.3/0.5 | 0.2/0.4/0.6/1.0 |
| LT-Z | Z | 100/200/300/500 | 0.1/0.2/0.3/0.5 | 0.2/0.4/0.6/1.0 |
| HS1 | X | 10/30/50/70/100 | 0.01/0.03/0.05/0.07/0.1 | 0.02/0.06/0.1/0.14/0.2 |
| HS1H | X | 30/50/70/100 | 0.03/0.05/0.07/0.1 | 0.06/0.1/0.14/0.2 |
| CX.100 | X | 100 | 0.1 | 0.2 |
| LF1 | X | 100/200/300 | 0.1/0.2/0.3 | 0.2/0.4/0.6 |
| SLR | X | 300/500/800/1500 | 0.3/0.5/0.8/1.5 | 0.6/1/1.6/3 |
| 主要参数 | 轴心 | 旅行路线(μm) | 识别率(nm) | 相同性(nm) |
| LF2 | X-Y | 100/200/300 | 0.1/0.2/0.3 | 0.2/0.4/0.6 |
| LFS2 | X-Y | 100 | 0.1 | 0.2 |
| LFHS2 | X-Y | 30/50/75 | 0.03/0.05/0.075 | 0.06/0.1/0.15 |
| LT2 | X-Y | 100/200/300 | 0.1/0.2/0.3 | 0.2/0.4/0.6 |
| LTHS2 | X-Y | 30/50/75 | 0.03/0.05/0.075 | 0.06/0.1/0.15 |
| C2.100 | X-Y | 100 | 0.1 | 0.2 |
| BIO2 | X-Y | 100/200/300 | 0.1/0.2/0.3 | 0.2/0.4/0.6 |
| MWPW.800 | X-Y | 800 | 0.8 | 1.6 |
| 规格型号 | 轴心 | 旅行路线(μm) | 辩别率(nm) | 反复相对标准偏差(nm) |
| LT3 | X-Y-Z | 100/200/300 | 0.1/0.2/0.3 | 0.2/0.4/0.6 |
| LTHS3 | X-Y-Z | X-Y:75,Z:50 | X-Y:0.075 , Z:0.05 | X-Y:0.15 , Z:0.1 |
| LF3 | X-Y-Z | X-Y:100/200/300Z:50 | X-Y:0.1/0.2.0.3Z:0.05 | X-Y:0.2/0.4/0.6Z:0.1 |
| LFS3 | X-Y-Z | X-Y:100Z:20 | X-Y:0.1Z:0.02 | X-Y:0.2Z:0.04 |
| LFHS3 | X-Y-Z | X-Y:30/50/75Z:25/50 | X-Y:0.03/0.05/0.075Z0.025/0.05 | X-Y:0.025/0.05Z:0.05/0.1 |
| SPM3 | X-Y-Z | X-Y:30/50/75Z:5/10/25/50 | X-Y:0.03/0.05/0.075Z:0.005/0.01/0.025/0.05 | X-Y:0.06/0.1/0.15Z:0.01/ |
| SMP3LR | X-Y-Z | X-Y:100/200/300,Z:5/10/25/50 | X-Y:0.1/0.2/0.3Z:0.005/0.01/0.025/0.05 | X-Y:0.2/0.4/0.6Z:0.01/0.02/0.05/0.1 |
| BIO3 | X-Y-Z | 100/200/300 | 0.1/0.2/0.3 | 0.2/0.4/0.6 |
| C3.100 | X-Y-Z | 100 | 0.1/0.2 | 0.2/0.4 |
| CUBE3 | X-Y-Z | 100/200 | 0.1/0.2 | 0.2/0.4 |
| 1轴地位器 | 2轴位置定位器 | 3轴定位手机器 |
| LT-Z | BIO2 | BIO3 |
| LF1 | LT2 | LT3 |
| LF2 | LF3 | |
| LTHS2 | LTHS3 | |
| LFHS2 | LFHS3 | |
| SPM3 |